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Workshop & Exhibition: ALD for Industry

  • - :
  • Dresden

Europäische Forschungsgesellschaft Dünne Schichten e.V.

Ansprechpartner: Grit Kotschenreuther

Tel.: +49 351 8718372

5th Workshop, Tutorial & Exhibition

Atomic Layer Deposition (ALD) is used to deposit ultraconformal thin films with sub-nm film thickness control. The method is unique in the sense that it em­ploys sequential self-limiting surface reactions for growth in the monolayer thickness regime. Today, ALD is a key technology in leading edge semiconductor technology and the field of application in other industries is increasing rapidly.

Weitere Informationen finden Sie unter: https://www.efds.org/event/ald2021/
Weitere Veranstaltungen des Veranstalters Europäische Forschungsgesellschaft Dünne Schichten e.V.